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Semiconductor laboratory decoration, thousand-level ultra-clean room construction project and plan

文章出处:Technology|阅读量:447|发表时间:2021-03-18

With the continuous research and development, upgrades and various use requirements of various product production technology and product performance, the requirements for the control of air cleanliness and pollutants in industrial decoration are constantly changing and improving, especially the 5G boom and semiconductor integrated circuits. The rapid development is an important sign of the expansion of cleanliness grade and the increasingly strict control of particle size.

Thousand-level purification workshops are widely used, and they are often used in the decoration design of hospital operating rooms, machinery and electronics industries. Class 1000 clean room means that the amount of fine dust is controlled within 1000 per cubic meter. At the same time, in order to prevent the clean space from being polluted by the outside, there are also requirements on the indoor pressure difference, usually requiring internal pressure (static pressure)> external pressure ( Static pressure); space pressure with high cleanliness requirement> space pressure with low cleanliness requirement; the direction of the clean room door should open to a room with high cleanliness level. For more details on the decoration design standards and general practices of the thousand-level purification workshop, please see below

I.The decoration design standard of the thousand-level purification workshop

1.The building of a thousand-level purification workshop is usually divided into two types: civil structure and assembly type. The assembly type is more common. It mainly includes the air-conditioning return air system, exhaust system and others composed of primary, intermediate, and advanced air filters. Supporting system.

2.Requirements for setting indoor air parameters in a thousand-level purification workshop:

① Temperature and humidity requirements: the temperature is generally 24+2℃, and the relative humidity is 55+5%.

② Fresh air volume: 10-30% of the total air supply volume in a non-unidirectional flow clean room; compensate for the amount of fresh air required for indoor exhaust and maintain the positive pressure value in the room; ensure that the amount of fresh air per person per hour in the room is ≥40m3/ h.

③ Air supply volume: to meet the cleanliness and heat and humidity balance in the dust-free workshop.

II.General practice of thousand-level purification workshop

Regarding the general practice of the thousand-level purification workshop, CEIDI Xidi will compare and analyze the three design schemes of the circuit board thousand-level purification workshop. The case here is a typical process room in a U.S.-funded flexible circuit board EPC general contracting project in Suzhou. The temperature and humidity are required to be (21 ± 2) ℃, and the humidity is controlled at (55 ± 10)%.

1. Option 1: AHU (air conditioning unit) + HEPA (high-efficiency air outlet)

2. Option 2: MAU (fresh air unit) + RAU (circulation unit) + HEPA (high efficiency air supply outlet)

3. Option 3: AHU (air conditioning unit) + FFU (fan filter unit)

Comparing the three schemes, it is found that the cost of the three schemes is not much different. However, because scheme three uses a large amount of circulating air and only passes through high-efficiency filtration once, it consumes less energy in operation than scheme one and scheme two. Therefore, in the market, as the price of FFU decreases, the thousand-level purification workshop is more and more popular with designers and construction parties.

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